双层透明薄膜制备及氧含量对折射率影响研究

摘要

利用磁控溅射技术在玻璃基片上分别沉积ZnOx薄膜、TiO2-y薄膜和TiO2-y/ZnOx双层透明薄膜,改变薄膜沉积过程中的氩气(Ar)和氧气((O2)的比例,获得具有不同氧含量的ZnOx薄膜和TiO2-y薄膜.采用椭偏仪测定所有样品的折射率,仔细研究薄膜中氧含量对折射率的影响.分别选择具有较大的折射率TiO2-y薄膜和具有较小的折射率ZnOx薄膜的生长条件,制备TiO2-y/ZnOx双层薄膜,获得光密媒质/光疏媒质双层结构,并观察到He-Ne激光从ZnOx薄膜入射到TiO2-y/ZnOx界面上发生的全反射现象.研究成果适用于大学生物理实验中的研究型实验或大学创新实验.%Transparent ZnO1-x, TiO2-y thin films and ZnO1-x/TiO2-y bilayer were deposited on normal glass substrates by magnetron sputtering. Controlling the ratio of argon (Ar) to oxygen (O2 ) , ZnO1-x ,TiO2-y thin films with different oxygen composition were obtained. The refractivity of all ZnO1-x, TiO2-y thin films were measured by ellipsometry and the influence of oxygen composition on refractivity was studied in detail. ZnO1-x/ TiO2-y bilayer was prepared under the growth conditions to obtain lower refractivity of ZnO1-x and higher refractivity of TiO2-y. The thinner medium/ denser medium structure was grown. The total reflection phenomena were observed when He-Ne red laser struck the interface of ZnO1-x/TiO2-y from ZnO1-x thin film. The results are suitable for research and innovation-led experiment for undergraduate students in general physics experiments.