为了实现表面等离子器件的光电集成应用,采用典型的金属-介质-金属中刻蚀2条紧邻的缝隙结构,设计了一种新型的定向耦合器.分析本征模式的波导方程、反转粒子数与时间关系,得到了定向耦合器的耦合条件.耦合器特性分别表明:设计的缝隙结构表面等离子能够通过缝隙1向缝隙2渗透,可以实现表面等离子在缝隙间的周期性传播,表面等离子传播在2 μm左右;耦合距离与缝隙大小表现为线性的关系,当缝隙大小小于100 nm时,能够实现更高的耦合效率、更短的耦合距离;设计的定向耦合器可以通过减小缝隙大小提高表面等离子传播的耦合效果.%In order to realize the photoelectric integrated application of the surface plasma device, and by etching 2 adjacent slot structures in the typical metal-medium-metal, a new type of directional coupler is designed.By analyzing the relationship between the waveguide equation and the inversion particle number of the intrinsic mode and time, the coupling conditions of the directional coupler are obtained.The coupler features respectively show that the plasma on the designed gap structure surface can penetrate through the gap 1 to the gap 2, and can realize the periodic propagation of the surface plasma in the gap.The surface plasma propagation is about 2 μm.The coupling distance and aperture size show the linear relationship.When the designed gap is less than 100nm, a higher coupling efficiency and a shorter coupling distance can be realized.The designed directional coupler can improve the coupling effect of the surface plasma propagation by reducing the gap between the slots.
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