应用MATLAB研究机器视觉系统的光源特性

摘要

在研制带有机器视觉系统的半导体专用设备时,光源成像的质量对机器视觉系统起着关键作用。将研究如何利用MATLAB的三维绘图及数字图像处理功能,对光源成像的质量进行可视化及量化评测。%In the development of a Machinery Vision for semiconductor equipment,the illumination source imaging quality of Machinery Vision plays a key role in.This paper studies how to use MATLAB 3D Visualization and image processing function,the illumination source imaging quality for visualization and quantification of evaluation.