提高探针台测试效率的方法研究

摘要

分析探针台的自动测试流程，从减少运动次数和时序重合两方面提出了几种提高探针台测试效率的方法，说明其实现原理，并用实际测试的数据，证明这些方法对效率确有提高。%This analysis the autom atic testprocess of Prober,elicitsome methods which are related to reducing the movement or the time overlapping to improvetest efficiency of the Prober,explain the principle.Use the experim entaldata to prove thatthese methods do improvethe efficiency.