半导体制造业降低全氟化碳（PFCs）排放的研究

摘要

The semiconductor industry has entered a new development era. Research on environmental protection and energy - saving of semiconductor industry has become an important topic for technological development. Perfluorocarbon（ PFCs ）was re- garded as a greenhouse gas with the highest global warming potential as well as one of the controlled greenhouse gases in the Kyoto Protocol. All the semiconductor industry enterprises, environmental departments and research institutes in the world still make ef- forts to reduce emission. This paper researches and analyses the emission reduction methods from current discharge situation, forming mechanisms, discharge characteristics, pollution control processes and incentive measures.%半导体制造业作为信息产业的基础，半导体元件的需求增长迅速。半导体行业的环保节能研究已成为技术发展的主题。全氟化碳（PFCs）为目前认为具有高温室气体暖化潜势的气体，也是《京都议定书》控制的6种温室气体之一，对气候的影响能力不可忽视。全球各半导体行业、环保部门及相关研究机构仍在不断努力减排。本文从半导体行业中PFCs的排放现状、产污环节、排放特点、污控途径、激励措施等方面对其减排途径进行了研究和分析。