of;
Optoelectronic;
Information;
University;
of;
Electronic;
Science;
and;
Technology;
of;
China;
Chengdu;
610054;
China;
of;
Optoelectronic;
Information;
University;
of;
Electronic;
Science;
and;
Technolotr~;
of;
China.;
Chen~du;
610054.;
China.;
薄膜传感器; 碳纳米管; 气敏性能; 甲苯; 扫描电子显微镜; 检测性能; 叉指电极; 敏感薄膜;