低压射流辅助激光刻蚀加工工艺参数的数值仿真预测研究

摘要

According to the actual situation of low-pressure jet assisted laser etching processing,the heat conduction equations have been established and the finite element numerical simulation models have been developed.The composite etching of SiC ceramics is taken as an example,comparing the numerical results with the test results to verify the feasibility of numerical simulation method.On this basis,the process parameters which affect the shape of the etching cross section are predicted by using numerical simulation method.Which provides an accurate method for studying the influence of each parameter on the processing effect.It also provides an accurate method for selecting the appropriate processing parameters.%低压射流辅助激光刻蚀加工过程中涉及到的加工参数较多,合理选取参数对加工效果的影响至关重要.针对低压射流辅助激光刻蚀加工的实际情况,建立了该加工工艺的热传导方程及有限元数值仿真模型.以碳化硅陶瓷的复合刻蚀加工为例,通过数值计算与实验结果的对比验证了数值仿真方法的可行性.在此基础上,介绍了采用数值仿真方法进行工艺参数对刻蚀截面形状影响预测研究的思路.为研究各参数对加工效果的影响或选择合适的加工工艺参数提供了一种快捷准确的方法.