工具摇动对超声波加工微孔深径比的影响

摘要

微细超声加工深孔时会出现加工速度太小或加工力过大的现象,导致深孔加工无法继续.为此,采用辅助工具摇动的方法进行微细超声微孔加工实验,成功加工出直径约为92 μm、深径比大于10的微孔,且加工效率明显提高.同时研究了工具摇动对加工效果的影响.%When a micro hole is drilled deeply using micro ultrasonic machining (USM),machining speed slows down and the breakage of micro tool may occur.The application the planetary movement of micro tool in deep hole drilling in micro USM is proposed.The micro holes of about 92 μm in diameter with an aspect ratio larger than 10 have been machined. The processing efficiency has been improved. The influence of planetary movement on machining results has been investigated.