Design of Thermo-Optic Variable Optical Attenuator Based on Quartz Substrate

摘要

Inthis paper, we designed a thermo-optic variable optical attenuator (VOA) based on quartz substrate, which consists of a Mach-Zehnder interferometer (MZI) and a thin film heater above the phase-modulation arm. The transmission properties of the waveguide and attenuation characteristics of the device have been simulated by beam propagation method (BPM), and the simulated results illustrated that the designed VOA had good performance.