Contents and Abstracts of Chinese Journal of Mechanical Engineering (Chinese Edition),ISSN 0577-6686,CN 11-2187/TH(Vol.43,No.11,2007)

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Contents and Abstracts of Chinese Journal of Mechanical Engineering (Chinese Edition),ISSN 0577-6686,CN 11-2187/TH(Vol.43,No.11,2007)

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Vol.43,No.3,2007 NEXT GENERATION LITHOGRAPHY——IMPRINT LITHOGRAPHY DING Yucheng LIU Hongzhong LU Bingheng LI Dichen (State Key Laboratory of Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China)

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《中国机械工程学报：英文版》 |2007年第6期|120-134|共15页
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正文语种 chi
中图分类机械、仪表工业;
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PP; NG; Chinese Edition; Contents and Abstracts of Chinese Journal of Mechanical Engineering; Vol.43; No.11; 2007; CN;

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Contents and Abstracts of Chinese Journal of Mechanical Engineering (Chinese Edition),ISSN 0577-6686,CN 11-2187/TH(Vol.43,No.11,2007)

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