Etch Products Group, Lam Research Corporation, Fremont, CA, USA;
Aluminum; Spherical; Power; Gas; Fluidization; Bed; Oxidation; Mechanism; Oxide; Growth; Rate; Gibbs; Free; Energy; Ellingham; Diagram; Mathematical; Modeling; Dynamic; System; Plasma; Diffusion; Diffusion; Coefficient; Crystallographic; Defect; Vacancy; Pressure; Temperature; Flow; Laplace; Transform; Equation; Boundary; Condition; Fick’s; Second; Law; Software; Experimental; Theoretical; Surge; Arresting; Materials; Analytical; Solution;