Department of Mechanical and Energy Engineering Southern University of Science and Technology No.1088 Xueyuan Road Shenzhen Guangdong 518055 People’s Republic of ChinaSchool of Engineering Faculty of Science University of East Anglia Norwich Research Park Norwich NR47TJ United Kingdom;
Department of Mechanical and Energy Engineering Southern University of Science and Technology No.1088 Xueyuan Road Shenzhen Guangdong 518055 People’s Republic of China;
Department of Mechanical and Energy Engineering Southern University of Science and Technology No.1088 Xueyuan Road Shenzhen Guangdong 518055 People’s Republic of China;
School of Engineering Faculty of Science University of East Anglia Norwich Research Park Norwich NR47TJ United Kingdom;
Department of Mechanical and Energy Engineering Southern University of Science and Technology No.1088 Xueyuan Road Shenzhen Guangdong 518055 People’s Republic of China;
Department of Mechanical and Energy Engineering Southern University of Science and Technology No.1088 Xueyuan Road Shenzhen Guangdong 518055 People’s Republic of China;
silicon carbide; subsurface damage; SSD detection; ICP etching;