首页> 中文期刊> 《微系统与纳米工程(英文)》 >Multicomponent SF6 decomposition product sensing with a gas-sensing microchip

Multicomponent SF6 decomposition product sensing with a gas-sensing microchip

         

摘要

A difficult issue restricting the development of gas sensors is multicomponent recognition.Herein,a gas-sensing(GS)microchip loaded with three gas-sensitive materials was fabricated via a micromachining technique.Then,a portable gas detection system was built to collect the signals of the chip under various decomposition products of sulfur hexafluoride(SF6).Through a stacked denoising autoencoder(SDAE),a total of five high-level features could be extracted from the original signals.Combined with machine learning algorithms,the accurate classification of 47 simulants was realized,and 5-fold cross-validation proved the reliability.To investigate the generalization ability,30 sets of examinations for testing unknown gases were performed.The results indicated that SDAE-based models exhibit better generalization performance than PCA-based models,regardless of the magnitude of noise.In addition,hypothesis testing was introduced to check the significant differences of various models,and the bagging-based back propagation neural network with SDAE exhibits superior performance at 95%confidence.

著录项

获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号