Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian 116024 China;
Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian 116024 China;
Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian 116024 China;
Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian 116024 China;
On-line measurement; Diameter; Roundness error; Alignment error;