An adaptive sliding mode controller design to cope with unmatched uncertainties and disturbance in a MEMS voltage reference source

摘要

Tunable micro-electro-mechanical systems(MEMS)capacitors as the fundamental parts are embedded in MEMS AC voltage reference sources(VRS).Being concerned with the accuracy of the output voltage in the reference sources,it gets important to address uncertainties in the physical parameters of the MEMS capacitor.The uncertainties have the great inevitable potentiality of bringing about output voltage perturbation.The output deterioration is more remarkable when the uncertainties are accompanied by disturbance and noise.Manufacturers have been making great attempts to make the MEMS adjustable capacitor with desired rigorous physical characteristics.They have also tried to mitigate physical parameter veracity.However,ambiguity in the values of the parameters inescapably occurs in fabrication procedures since the micro-machining process might itself suffer from uncertainties.Employing a proportional integral(PI)adaptive sliding mode controller(ASMC),both terms of matched and unmatched uncertainties as well as the disturbance,are addressed in this work for the MEMS AC VRS so that a strict voltage is stabilized while the system is simultaneously subjected into uncertainties and exogenous disturbance.Cross-talk,some inertial forces,and electrostatic coercions may appear as matched and unmatched disturbances.Alteration in stiffness and damping coefficients might also take place as matched uncertainties due to variations in the fabrication process or even working environment.The simulation results in the paper are persuasive and the controller design has shown a satisfactory tracking performance.