State;
Key;
Laboratory;
of;
Functional;
Materials;
for;
Informatics,;
Shanghai;
Institute;
of;
Microsystem;
and;
Information;
Technology,;
the;
Chinese;
Academy;
of;
Sciences,;
Shanghai;
200050,;
China;
太赫波; 传播特征; 传播常数; 半导体; 表面等离子体激光;