Key;
Laboratory;
of;
Optical;
Communication;
&;
Lightwave;
Technologies;
of;
Ministry;
of;
Education,;
Beijing;
University;
of;
Posts;
and;
Telecommunications,;
Beijing;
100876,;
China;
金属有机化学气相沉积; 反应器; 数值研究; 工艺参数优化; MOCVD生长; 热场; 旋转模式; 动态建模;