Abnormal Alignment of Misfit Dislocations in In_(0.52)Al_(0.48)As/In_(x)Ga_(1-x)As/In_(0.52)Al(0.48)As/InP Heterostructure

摘要

It was observed with transmission electron microscopy in the In_(0.52)Al_(0.48)As/In_(x)Ga_(1-x)As/In_(0.52)Al(0.48)As/InP heterostructure that misfit dislocation lines deviate from the<110>directions at a certain angle depending on the indium content x.Such an abnormal alignment of misfit dislocations is explained in terms of an alloy effect on the formation of single jogs on the misfit dislocations in the interface between the Ⅲ-Ⅳ ternary compounds.