Epitaxial Growth of Bi_(2)Sr_(2-x)LaxCu_(1)O_(6+δ) Thin Films by In-Situ dc Magnetron Sputtering

摘要

Bi_(2)Sr_(2-x)LaxCu_(1)O_(6+δ)(La-2201)thin films were successfully prepared on(100)SrTiO_(3) and(100)LaAIO_(3) substrates by in-situ dc-magnetron sputtering process.A series compensated 2201 targets of La^(3+)substitution contents for Sr^(2+)were studied for growing 2201 phase thin films.The superconducting zero resistance temperature T_(c,0) reached 19K.X-ray diffraction analyses showed that films oriented with c-axis perpendicular to the substrate surface and their lattice parameters are around 2.43-2.46nm.Ф-scan and rocking curve show a good epitaxial growth and crystallisation of the films.