Cathodoluminescence of ZnO Films

摘要

The cathodoluminescence of ZnO films deposited on Si substrates by reactive dc sputtering is investigated.Apart from the characteristic green emission band(522nm)of ZnO,an ultraviolet(392nm)band and a blue(430-460 nm)band have been observed.The x-ray diffraction and cathodoluminescent spectra reveal the dependences of the luminescence on the preparation conditions and crystallinity of the ZnO films.