AN AUTOMATIC CONTROL SYSTEM FOR MOLECULAR BEAM EPITAXY GROWTH EQUIPMENT

摘要

A two level computer control system MACS 1000 has been designed and built for the MBE equipment,by which the materials with heterostructure can be grown automatically.The block diagram of our system is shown in fig.l.An enhanced IBM-PC/XT compatible computer is adopted as the top level computer,on which the growth sequences of materials can be prepared.Once a growth sequence has been prepared and sent to the control computers,the top level computer can be utilized for other uses.