DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH ^(19)F IONS

摘要

The hydrogen depth profiling in solids has been done by elastic recoil detection(ERD)technique with multicharged ^(19)F ion beam from a small Tandem Accelerator of 2x1.7MV.Details of the experimental technique are described.The depth resolution of about 230Åin the near-surface regions(~5000Å)is much better than that of ERD technique with 2.5MeV He beam and heavy ion beam of 30MeV.