Reactive Sputter Deposition of Carbon Nitride Films by Using Hollow-Cathode Discharge

摘要

Carbon nitride films have been prepared by reactive sputtering using hollow cathode discharge.Auger spectra show that the nitrogen content is about 20-25at.%in the bulk.Infrared(IR)spectra,display three broad absorption bands.After heating treatmentf changes of IR spectra suggest that the nitrogen incorporating in the bonding network of amorphous is thermally stable and hydrogen conient decreases.