Atomic Force Microscopy Studies of Barium Titanate Thin Films Prepared by Laser Molecular Beam Epitaxy

摘要

Laser molecular beam epitaxy(laser MBE)technique was utilized to grow the barium titanate(BaTiO_(3),BTO)thin films on SrTiO_(3)(100)substrates.The surface morphology of the BaTiO_(3) thin films was studied by atomic force microscopy(AFM).Two-and three-dimensional AFM images were obtained.The root mean square surface roughness,the height profile,the histogram and the bearing ratio of the height distributions for the BaTiO_(3) thin films were analyzed in detail.The results indicate that the laser MBE thin films exhibit an atomically smooth surface.