Heteroepitaxial Growth of Diamond Film on Cubic Boron Nitride Substrate by Hot-Filament Chemical Vapour Deposition

摘要

Diamond films have been grown on high pressure synthesized cubic boron nitride(c-BN)particles by hot-filament chemical vapor deposition method,and heteroepitaxial diamond films on the c-BN(100)facets with no-evident defects were obtained,but polycrystalline diamond films were formed only on the c-BN(111)facets.