Observation of the Si(100)-(2×2)Phase and Measurements of Low Energy Electron Diffraction I-V Curves

摘要

A new phase of(2×2)has been observed as a result of hydrogen ion sputter etching on a clean reconstructed Si(100)-(2×1)surface using low energy electron diffraction(LEED).It has been found that the(2×1)surface first transformed into a metastable c(4×4)phase following hydrogen ion etching and after further anneal of the sample,a(2×2)phase can be obtained.Intensity vs electron energy(I-V)curves for the Si(100)-(2×2)pattern have been measured using a special video LEED system.