Influence of Rapid Thermal Annealing on Structural and Interfacial Properties of Lead-Zirconate-Titanate Thin Films Prepared by Excimer Laser Deposition

摘要

Lead zirconate titanate thin films were prepared by pulsed excimer laser deposition on silicon substrates.Rapid thermal annealing was used to improve its properties.Structural and interfacial characteristics of the films before and after annealing were investigated by x-ray diffraction,Rutherford backscattering spectrometry and automatic spreading resistance。