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Effect of Pt Interlayer on Low Resistivity Ohmic Contact to p-InP Layer and Its Optimization

         

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  • 来源
    《中国物理快报:英文版》 |2021年第6期|102-105|共4页
  • 作者单位

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    University of Chinese Academy of Sciences Beijing 100049 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    The Yangtze River Delta Physics Research Center Liyang 213000 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    NANO-X Suzhou Institute of Nano-Tech and Nano-Bionics Chinese Academy of Sciences Suzhou 215123 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    Songshan Lake Materials Laboratory Dongguan 523808 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    Songshan Lake Materials Laboratory Dongguan 523808 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    The Yangtze River Delta Physics Research Center Liyang 213000 China;

    Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;

    Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;

    Songshan Lake Materials Laboratory Dongguan 523808 China;

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  • 正文语种 eng
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