Ion-Implanted Waveguides in a Nd3+-Doped Silicate Glass

摘要

Monomode enhanced-index Nd3+-doped silicate glass waveguides fabricated by ion implantation are reported.The Nd3+-doped silicate glass was implanted by 3.0MeV B+ ions,3.0MeV O+ ions and 4.5 MeV Ni2+ ions,respectively.A prism-coupling method was carried out to measure dark modes in the Nd3+-doped silicate glass using a model 2010 prism coupler.The moving fibre method was applied to measure the waveguide propagation loss.After a moderate annealing,the 3.0-MeV B+-ion implanted waveguide loss is about 3.54 dB/cm;the 3.0-MeV O+-ion implanted waveguide loss is about 5.36 dB/cm;and the 4.5-MeV the Ni2+-implanted waveguide loss is about 7.55 dB/cm.The results show that with the increasing ion mass,the loss in implanted waveguide is increased.