机译:等效原理测试差分电容传感器的激励频率效应
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074;