Fabrication, Testing and Integration Technologies of Polymer Microlens for Pt/Si Schottky-Barrier Infrared Charge Coupled Device Applications

摘要

@@ A novel polymer refractive microlens array has been formed on the surface of 256(V)×290(H) PtSi Schottkybarrier infrared charge coupled device (IRCCD) image sensors to improve the photoresponsivity of the IRCCD.The fabrication process flows of polymer microlens array are described. An effective aperture ratio in excess of 92% of microlens array has been achieved. An experimental facility to evaluate the optical performance ofmicrolens array is introduced. The measurement results show that the microlens array indicates better than 4% non-uniformity of focal length and high optical performance. The application of the microlens array to improve the photosensitivity of infrared CCD is discussed.