High-Speed and Large-Scale Electromagnetically Actuated Resonant MEMS Optical Scanner

摘要

A high speed electromagneticlly actuated resonant micro-electromechanical systems (MEMS) optical scanner with large mirror area of 6×4mm2 has been developed.The MEAS optical scanner chip is fabricated using bulk silicon micromachining process and electroplating technique,and can generate the maximum optical deftection angle of±6.8°at the 2.95kHz resonant frequency with a quality factor of 197 in air under the low power consumption of 50m W.when it is immersed in a constant 510.2mT magnetic field parallel to the coil plane.In addition,the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity of mirror at wavelength of 1550nm is high up to 85%.The results show that the device can satisfy the demands of mm-sized scanning systems in optical communications.