Numerical Study on Characteristics of Argon Radio-Frequency Glow Discharge with Varying gas Pressure

摘要

A one-dimensional fluid simulation on argon rf glow discharge with varying linearly gas pressure from 1 Torr to 100 Torr is performed. The model based on mass conservation equations for electron and ion under diffusion and mobility approximation, and the electron energy conservation equation is solved numerically by finite volume method. The numerical results show that a uniform plasma with high density can be obtained from rf glow discharge with varying gas pressure, and the density of plasma becomes higher as the gas pressure varies from 1 Torr to 100 Torr. It is also shown that in the range of the gas pressure from 1 Torr to 100 Torr with the slower rate of varying gas pressure, higher density of plasma can be obtained.