A Multiple Resonant Mode Film Bulk Acoustic Resonator Based on Silicon-on-Insulator Structures

著录项

• 来源
  《中国物理快报：英文版》 |2014年第12期|70-73|共4页
• 作者

  CHEN Xiao; YANG Yi; CAI Hua-Lin; ZHOU Chang-Jian; Mohammad Ali MOHAMMAD; REN Tian-Ling;

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• 作者单位

  Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList),Tsinghua University, Beijing 100084;

  Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList),Tsinghua University, Beijing 100084;

  Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList),Tsinghua University, Beijing 100084;

  Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong;

  Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList),Tsinghua University, Beijing 100084;

  Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList),Tsinghua University, Beijing 100084;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词