首页> 中文期刊> 《中国物理快报:英文版》 >Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

         

著录项

  • 来源
    《中国物理快报:英文版》 |2014年第3期|169-172|共4页
  • 作者单位

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049;

    Le Quy Don Technical University, Hanoi 7EN-248, Vietnam;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Lab of Information Photonic Technique, School of Electronics and information Engineering, Xi'an Jiaotong University, Xi'an 710049;

  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号