机译:近物所在产生金属离子束方面的研究(英文)
Institute;
of;
Modern;
Physics;
Chinese;
Academy;
of;
Sciences;
Institute;
of;
Modern;
Physics;
Chinese;
Academy;
of;
Sciences;
Lanzhou;
730000;
China;
Graduate;
University;
of;
Chinese;
Academy;
of;
Science;
Beijing;
100049;
China;
ECR; metallic; ion; sputtering; consumption; rate;