机译:氪离子植入锌极性ZnO薄膜性能分析
School of Information Science and Engineering Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Jinan 250100 China;
School of Information Science and Engineering Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Jinan 250100 China;
Key Laboratory of Beam Technology of Ministry of Education College of Nuclear Science and Technology Beijing Normal University Beijing 100875 China;
School of Information Science and Engineering Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Jinan 250100 China;
School of Information Science and Engineering Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Jinan 250100 China;
School of Information Science and Engineering Shandong Provincial Key Laboratory of Laser Technology and Application Shandong University Jinan 250100 China;