机译：球形SiGe微/纳米结构，可调谐GE组成和由激光照射形成的尺寸
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
University of Chinese Academy of Sciences Beijing 100049 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Songshan Lake Materials Laboratory Dongguan 523808 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Songshan Lake Materials Laboratory Dongguan 523808 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
The Yangtze River Delta Physics Research Center Liyang 213000 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
University of Chinese Academy of Sciences Beijing 100049 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
University of Chinese Academy of Sciences Beijing 100049 China;
Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics Chinese Academy of Sciences China;
Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
The Yangtze River Delta Physics Research Center Liyang 213000 China;
Key Laboratory for Renewable Energy Beijing Key Laboratory for New Energy Materials and Devices Beijing National Laboratory for Condensed Matter Physics Institute of Physics Chinese Academy of Sciences Beijing 100190 China;
Center of Materials and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Songshan Lake Materials Laboratory Dongguan 523808 China;
