机译：H +缺陷进化机制及HE +植入INP
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education School of Materials Science and Engineering Xiangtan University Xiangtan 411105 China;
Hunan Provincial Key Laboratory of Thin Film Materials and Devices School of Materials Science and Engineering Xiangtan University Xiangtan 411105 China;
State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China;
China Nanhu Academy of Electronics and Information Technology Jiaxing 314000 China;
Department of Control Engineering Faculty of Electrical Engineering Czech Technical University in Prague Technická 2 16000 Prague 6 Czechia;
State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China;
Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China;
Science and Technology on Power Sources Laboratory Tianjin Institute of Power Sources Tianjin 300384 China;
China Nanhu Academy of Electronics and Information Technology Jiaxing 314000 China;
The 13th Research Institute CETC Shijiazhuang 050051 China;
Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education School of Materials Science and Engineering Xiangtan University Xiangtan 411105 China;
Hunan Provincial Key Laboratory of Thin Film Materials and Devices School of Materials Science and Engineering Xiangtan University Xiangtan 411105 China;
