机译:V形沟型Si基板上的GaAs外延生长的热应力降低
State Key Laboratory of Information Photonics and Optical Communications Beijing University of Posts and Telecommunications Beijing 100876 China;
State Key Laboratory of Information Photonics and Optical Communications Beijing University of Posts and Telecommunications Beijing 100876 China;
State Key Laboratory of Information Photonics and Optical Communications Beijing University of Posts and Telecommunications Beijing 100876 China;
State Key Laboratory of Information Photonics and Optical Communications Beijing University of Posts and Telecommunications Beijing 100876 China;
State Key Laboratory of Information Photonics and Optical Communications Beijing University of Posts and Telecommunications Beijing 100876 China;
Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;
Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China;