机译:HW-ECR-CVD系统制备的氢化非晶硅薄膜的Staebler-Wronski效应的半定量研究
School;
of;
Physical;
Science;
and;
Technology;
Lanzhou;
University;
730000;
China;
The;
Key;
Laboratory;
Advanced;
Functional;
Materials;
Ministry;
Education;
Beijing;
100022;
Staebler-Wronski效应; 氢化无定形硅薄膜; 亚稳定性; 光电导性; 光照时间;