机译:一种新型的具有大填充因子的高效光栅耦合器,用于光电集成
^pKey;
Laboratory;
on;
Integrated;
Optoelectronics;
Institute;
of;
Semiconductors;
Chinese;
Academy;
Sciences;
Beijing;
100083;
China;
^pResearch;
Center;
for;
Semiconductor;
Technology;
光栅耦合器; 填充因子; 光电集成; 耦合效率; 光纤波导; 硅绝缘体; 散射中心; 预测模拟;