机译:以Al2O3 / HfSiO叠层为阻挡层的改进的电荷俘获闪光器件
Laboratory;
of;
Nano-Fabrication;
and;
Novel;
Devices;
Integrated;
Technology;
Institute;
Microelectronics;
Chinese;
Academy;
Sciences;
Bcijing;
100029;
China;
闪存设备; 阻挡层; 堆栈; 捕获; 电荷; 能带工程; 非易失性; 氧化物;