机译:超大规模双栅硅n-MOSFET中的量子限制效应和源极至漏极隧穿
State;
Key;
Laboratory;
of;
Superlattices;
and;
Microstructures;
Institute;
Semiconductors;
Chinese;
Academy;
Sciences;
P.;
O.;
Box;
912;
Beijing;
100083;
China;
N-MOSFET; 量子限制效应; 隧道电流; 金属氧化物半导体场效应晶体管; 双栅; 机身厚度; 硅; 通道长度;