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Effect of substrate type on Ni self-assembly process

机译:衬底类型对镍自组装过程的影响

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摘要

Ni self-assembly has been performed on GaN (0001), Si (111) and sapphire (0001) substrates. Scanning electron microscopy (SEM) images verify that the Si (111) substrate leads to failure of the Ni assembly due to Si–N interlayer formation; the GaN (0001) and sapphire (0001) substrates promote assembly of the Ni particles. This indicates that the GaN/sapphire (0001) substrates are fit for Ni self-assembly. For the Ni assembly process on GaN/sapphire (0001) substrates, three differences are observed from the x-ray diffraction (XRD) patterns: (i) Ni self-assembly on the sapphire (0001) needs a 900 ℃ annealing temperature, lower than that on the GaN (0001) at 1000 ℃, and loses the Ni network structure stage;(ii) the Ni particle shape is spherical for the sapphire (0001) substrate, and truncated-cone for the GaN (0001) substrate; and (iii) a Ni–N interlayer forms between the Ni particles and the GaN (0001) substrate, but an interlayer does not appear for the sapphire (0001) substrate. All these differences are attributed to the interaction between the Ni and the GaN/sapphire (0001) substrates. A model is introduced to explain this mechanism.
机译:Ni自组装已在GaN(0001),Si(111)和蓝宝石(0001)基板上执行。扫描电子显微镜(SEM)图像证实,由于Si-N中间层的形成,Si(111)衬底导致Ni组件失效; GaN(0001)和蓝宝石(0001)衬底促进了Ni粒子的组装。这表明GaN /蓝宝石(0001)衬底适合Ni自组装。对于在GaN /蓝宝石(0001)衬底上的Ni组装工艺,从X射线衍射(XRD)图案观察到三个差异:(i)在蓝宝石(0001)上进行Ni自组装需要900℃的退火温度,比GaN(0001)在1000℃时要大,并且失去了Ni网络结构阶段;(ii)对于蓝宝石(0001)衬底,Ni颗粒形状为球形,而对于GaN(0001)衬底,其截锥形状; (iii)在Ni颗粒和GaN(0001)衬底之间形成了Ni-N中间层,但对于蓝宝石(0001)衬底没有出现中间层。所有这些差异都归因于Ni与GaN /蓝宝石(0001)衬底之间的相互作用。引入一个模型来解释这种机制。

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  • 来源
    《中国物理:英文版》 |2019年第1期|533-539|共7页
  • 作者单位

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electric and Information Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China;

    School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China;

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