机译:Ti / Al / Ni / Au欧姆接触通过激光退火形成AlGaN / GaN异质结构的机理
College of Electrical Engineering, Zhejiang University, Hangzhou 310027, China;
College of Electrical Engineering, Zhejiang University, Hangzhou 310027, China;
College of Electrical Engineering, Zhejiang University, Hangzhou 310027, China;