机译:电子回旋共振微波等离子增强化学气相沉积制备原纤维状交织类金刚石碳膜
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China;
ECR microwave plasma; diamond-like carbon films; AFM; FTIR;