机译:动力学蒙特卡洛法三维模拟倾斜沉积薄膜
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
kinetic Monte Carlo method; oblique deposition; three-dimensional morphology; microstructure;