机译:具有场感应源极/漏极扩展的6H-SiC肖特基势垒源极/漏极NMOSFET
Microelectronics Institute, Xidian University, Xi'an 710071, China;
Microelectronics Institute, Xidian University, Xi'an 710071, China;
Microelectronics Institute, Xidian University, Xi'an 710071, China;
Microelectronics Institute, Xidian University, Xi'an 710071, China;
SBSD-MOSFET, FISD, sidewall, 6H-Sic;