机译:用于空间应用的氮化碳膜的沉积
Physics Department, Lanzhou University, Lanzhou 730000, China;
Lanzhou Institute of Physics, Lanzhou 730000, China;
Physics Department, Lanzhou University, Lanzhou 730000, China;
Lanzhou Institute of Physics, Lanzhou 730000, China;
Physics Department, Lanzhou University, Lanzhou 730000, China;
CNx film; hardness; atomic oxygen; cold welding; friction; wear;